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INDEX > Want to Buy List > MEMS 压阻式压力传感器代工厂

MEMS 压阻式压力传感器代工厂

Release time
2026-08-24 11:18:11
Contact Name
Visitor002693
No.
713
Product/Tech Service
  • Medical Equipment
Buy QTY.
1
Pictures
Valid period
2027-01-31
Demand details
加工一款MEMS压阻式压力传感器，器件总厚度100um，材料采用SOI晶圆（10+1+300 um）制备，硅衬底，顶层硅感压膜，电极金属铝，感压膜边缘中心为离子注入制作的4个压敏电阻；这个器件为晶圆(减薄至厚度50um)和玻璃(减薄至厚度50um)键合，总厚度100um。
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