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Planar semiconductor sensor
Used for detecting hydrogen sulfide gas, a multi-layer thick film manufacturing process is adopted, and a heater and a metal oxide semiconductor gas sensing layer are respectively made on both sides of the micro ceramic substrate, packaged in a metal shell. It has the characteristics of strong anti-interference ability, good stability, high sensitivity, and fast response recovery. Using a simple driving circuit can output signals, with a small size and easy integration. Can be applied to gas detection, gas alarms, safety fire detection, etc.