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PCB Mounted MEMS Pressure Sensor
The H65D series digital output pressure sensor is a ceramic-based, PCB-mountable pressure sensor capable of measuring absolute, gauge, or differential pressure. It is a piezoresistive silicon pressure sensor with digital output, designed to accurately measure pressure within the specified full-scale pressure and temperature ranges, ensuring stable performance.
| Series Name | H65D | 
| Type | Onboard MEMS pressure sensor | 
| Minimum Typical Maximum Unit | |
| Supply voltage |       2.7 - 5.5 V DC | 
| Supply current | - 3 - mA | 
| Output span | - 14746 - 10 System | 
| Zero point output | - 1638 - | 
| Overload pressure |          4 - - BarA | 
| Burst pressure |          4.8 - - BarA | 
| Start-up delay | - - 10 ms | 
| Zero point long -term drift (one year) | - ± 0.2 - % FSS | 
| Output resolution | - 14 - bit | 
| Non-defective code resolution |        12 13 - bit | 
| Resolution | - 11 - bit | 
| Replacement rate | - 0.5 1 ms | 
| Total deviation | - ± 0.5 ± 1.0 % FSS | 
| Accuracy | - ± 0.1 ± 0.25 %FSS BFSL | 
| Overall accuracy | - 2 - ℃ | 
| Humidity | Gas medium: 0% to 95% relative humidity, 
non-condensing;  Liquid medium: 100%  condensed or direct liquid medium 
on port 1 | 
| Vibration | MIL-STD-202G, test method 204D, Ambient conditions B (15g, 10Hz to 2Hz) | 
| Impact | MIL-STD-202G, test method 213B, Ambient conditions C (100g, 6ms duration) | 
| Cycle life | At least 1 million pressure cycles | 
| Working medium | Suitable for non-corrosive, non-ionic working fluids, such as air, Dry gas, fluoride liquid, etc |