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PCB Mounted MEMS Pressure Sensor
The H65D series digital output pressure sensor is a ceramic-based, PCB-mountable pressure sensor capable of measuring absolute, gauge, or differential pressure. It is a piezoresistive silicon pressure sensor with digital output, designed to accurately measure pressure within the specified full-scale pressure and temperature ranges, ensuring stable performance.
Series Name | H65D |
Type | Onboard MEMS pressure sensor |
Minimum Typical Maximum Unit | |
Supply voltage | 2.7 - 5.5 V DC |
Supply current | - 3 - mA |
Output span | - 14746 - 10 System |
Zero point output | - 1638 - |
Overload pressure | 4 - - BarA |
Burst pressure | 4.8 - - BarA |
Start-up delay | - - 10 ms |
Zero point long -term drift (one year) | - ± 0.2 - % FSS |
Output resolution | - 14 - bit |
Non-defective code resolution | 12 13 - bit |
Resolution | - 11 - bit |
Replacement rate | - 0.5 1 ms |
Total deviation | - ± 0.5 ± 1.0 % FSS |
Accuracy | - ± 0.1 ± 0.25 %FSS BFSL |
Overall accuracy | - 2 - ℃ |
Humidity | Gas medium: 0% to 95% relative humidity,
non-condensing; Liquid medium: 100% condensed or direct liquid medium
on port 1 |
Vibration | MIL-STD-202G, test method 204D, Ambient conditions B (15g, 10Hz to 2Hz) |
Impact | MIL-STD-202G, test method 213B, Ambient conditions C (100g, 6ms duration) |
Cycle life | At least 1 million pressure cycles |
Working medium | Suitable for non-corrosive, non-ionic working fluids, such as air, Dry gas, fluoride liquid, etc |